Impact of Interface Properties on Direct Tunneling in Al/ALD-Al₂O₃/Al Capacitors for Josephson Junction Applications

Early Access, Open Access, , , , , , , , ,

Abstract: The Al/AlOx/Al system is widely used for the fabrication of Josephson junctions, which constitute the central element of superconducting qubits. The process parameters for growing ultra-thin AlOx barriers by thermal oxidation in-between physical vapor deposition (PVD) runs of Al films are well understood, but the resulting barriers present several drawbacks that limit performance such […]

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Superconducting Through-Substrate Vias on Sapphire Substrates for Quantum Circuits

Enabling Technologies, , , , , ,

Sapphire substrates have recently been recognized for their potential to improve the coherence time of superconducting qubits. However, due to challenges in via fabrication, silicon substrates have been predominantly used for qubits. In this study, we fabricated vias on sapphire substrates using lasers and deposited TiN films by chemical vapor deposition. Cross-sectional views of the […]

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Superconducting Through-Substrate Vias on Sapphire Substrates for Quantum Circuits

Regular, , , , , ,

Sapphire substrates have recently been recognized for their potential to improve the coherence time of superconducting qubits. However, due to challenges in via fabrication, silicon substrates have been predominantly used for qubits. In this study, we fabricated vias on sapphire substrates using lasers and deposited TiN films by chemical vapor deposition. Cross-sectional views of the […]

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